微機電系統-期未報告大綱.pptVIP

Advisor: Prof. C.H. Liu Introduction Theory Fabrication Test results Conclusions * Sang-chung MSCL * An Electrohydrodynamic Micropump for On-Chip Fluid Pumping on a Flexible Parylene Substrate Reporter: sang-chung yang Chia-Ling Chen1,*, Student Member, IEEE, Selvapraba Selvarasah1, Shih-Hsien Chao1, Azadeh Khanicheh2, Constantinos Mavroidis2, and Mehmet R. Dokmeci1, Member, IEEE 1 ECE Department, NSF-NSEC Center for High Rate Nanomanufacturing, Northeastern University, Boston, MA, USA 2 Mechanical and Industrial Engineering Department, Northeastern University, Boston, MA, USA NEMS2007 Page:242 Outline Introduction Micro pump: mechanical :1.moving parts(check-valve membrane) 2.high pumping rate 3.high power consumption 4.fabrication process complicated non-mechanical :1.no moving parts 2.low pumping rate 3.fabricate easily Fig. Piezoelectric pump Fig.EHD micropump 最強 介電常數 居中 最快 較慢 沉積速率 較低的透溼性 透濕性 可承受較高溫度 溫度穩定度 多二個氯原子 多一個氯原子 化學結構 Parylene D Parylene C Parylene N Ref:XBH Coporation 1.Lightweight 2.Transparent 3.stress-free 4.Biocompatible 5.Compatible with ic fabrication Introduction Fig. parylene-N,C,D Theory F:單位體積所受的力(force density) E:電場強度(electrical density) q:電荷密度(charge density) P:極化向量(polarization vector) ε:介電常數(permittivity of the fluid) ρ:流體密度(fluid density) Dominate term inlet outlet Fig. EHD pump Fig. A 3D schematic of the flexible EHD micropump Factors that influence the pumping efficiency 1.type of liquid 2.design of the electrodes Size: 5mm*7mm*80μm 20μm Theory Fabrication Fig. Fabrication process for EHD micropump on a flexible Parylene-C substrate 1.Parylene-C(10μm ) 2.Au(150nm) 3.SU-8(80μm) Silicon Substrate Parylene-C Spin PR Metal Fig. Optical photograph of the micropumps with SU8 1.Thicknesses of more than 5 μm are easy to peel 2.Before depositing parylene need to us