点光源阵列多重波面自由曲面检测系统设计与研究 硕士论文.doc

点光源阵列多重波面自由曲面检测系统设计与研究摘 要 光学自由曲面，相比传统光学面形其面形自由度更大，由于表面曲率变化很大，光学自由曲面的精确检测也是近年来产生的难题。为了实现光学自由曲面的通用化检测，本论文基于局部波前梯度补偿思想，设计了一套点光源阵列多重波面干涉检测系统。该系统具有非零位测量、测量动态范围大、空间分辨率高、不引入子孔径扫描机械误差、测量精度高等特点。 本文基于减小被测波前斜率的方法，主要研究了可用于光学自由曲面非零位检测的硬件光路系统以及点光源阵列补偿波前斜率技术等。本文研究设计的系统可以实现法线偏离最佳拟合球面法线±10(，口径(60的光学自由曲面的干涉图获取。主要结构包括典型Tyman干涉系统、球面补偿标准镜组和基于点光源阵列的斜率补偿模块。采用Tyman干涉结构，利用“黑盒子”原理采用光路逆向追迹的方法设计了球面补偿标准镜组。根据系统设计要求，研究了基于点光源阵列斜率补偿模块的设计方法，对微透镜阵列的结构参数进行测量论证。最后介绍整个光路系统的装调方法和过程，分析了系统装调结果。实现了对平面、球面、非球面以及自由曲面眼镜片的干涉图获取，为后续的软件算法设计和系统的误差评价标定奠定了基础。 关键词：光学自由曲面，非零位干涉检测，微透镜阵列，多重倾斜波面 Abstract Optical freeform surface, in comparison with other optical surface, has a bigger free extent. Because of its fiercely changing surface slope, its precise measurement has become a huge problem in recent years. In order to realize the universal test of optical freeform surface, this dissertaion bases on the theory of compensating local wavefronts slope and designs a point-source multi-wavefront interferometer system. This system has great charateristics of its non-null test, large test dynamic range, high spatial resolution, no subaperture mechanic scanning error, high test precision and so on. This dissertaion is on the basis of the method of decreasing test wavefronts slope. It manily focus on optical system of freeform surface non-null test system and technology of wavefronts slope compensation with point-source array. The sytem researched here can accomplish the test of optical freeform surface with 60 diameter whos normal angel deviate 10 degree from its best fit sphere. The system mainly includes typical Tyman interferometer system spherical compensating standard lens and wavefronts compensating module based on point source array. The system applies basic Tyman Inteferometer structure. Based on “Black Box” theory, we design spherical compensating standard lens with reverse trace method. To meet the requirement of optical freeform surface testing system, we have researched the designing method of point source arr