SECSI_SECSII_HSMS_GEM总结.ppt

Transition 状态转换标志 Default entry point 默认进入点 h History 历史记录 s Select c Conditional selector Communications State Diagram Communication enable Disable Communicating Not Communicating Wait CR Wait Delay Wait CRA passive Active c R S1f14 R S1f13 ECID=2 Control State Model Local Remote Equipment Off-line Host Off-line Attempt On-line c c c c Off-line On-line Offline EQP can’t communication with Host except S1F13,S1F17 and S2F42 .and SxFy reply S*F0. OffLine->OnLine need send S2F17 Date & Time Request If PTST LR or UR report ceid 200 203 ECID=3 Processing State Diagram INIT IDLE SETUP EXECUTING READY PAUSE H Processing State STOP ABORT completed PAUSE alarm RESUME Limit State Model DISABLED BELOW LIMIT NO ZONE ABOVE LIMIT C ENABLED State Diagram for Alarm ALIDn Alarm Clear Alarm Set S5F1 Alarm Report Sent S5F3 Enable/Disable Alarm Send(EAS) S5F103 Current Alarm Set List Request transaction Transaction Definition — A transaction forms the basis for all information exchanges in SECS-II. A transaction consists of either a primary message for which no reply is requested, or a primary message which requests a reply together with its corresponding secondary message. Secondary messages cannot request a reply. System Bytes T3 TimeOut S*F0,S6F1,S9F* no Reply message conversation A conversation is a series of one or more related transactions used to complete a specific task. Conversation Timeout(S9F13) Session session — a relationship established between two entities for the purpose of exchanging HSMS messages. session ID — a 16-bit unsigned integer which identifies a particular session between particular session entities. Session ID = Device ID * ISO（国际标准化组织）组织在1985年研究的网络互联模型。 设备的硬件，软件，工具，显示器，气体，原材料，光刻，打包，化学过程，安全线，硅材料和加工过程，半导体，生产过程的追踪 * SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-I) GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT HIGH-SPEED SECS MESSAGE SERVICES * * SESC I与 HSMS是数据的传输协议 RS232是个人计算机上的通讯接口之一，异步传输标