- 1、本文档共8页,可阅读全部内容。
- 2、原创力文档(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
- 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载。
- 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
查看更多
VOLUME 64, NUMBER 16 PHYSICAL REVIEW LETTERS 16 APRIL 1990
Dislocation-Free Stranski-Krastanow Growth of Ge on Si(1QQ)
D. J. Eaglesham and M. Cerullo
A Td'c T Bell Laboratories, 600 Mountain Avenue, Murray Hill, New Jersey 07974
(Received 27 December 1989)
We show that the islands formed in Stranski-Krastanow (SK) growth of Ge on Si(100) are initially
dislocation free -Isla. nd formation in true SK growth should be driven by strain relaxation in large,
dislocated islands. Coherent SK growth is explained in terms of elastic deformation around the islands,
which partially accommodates mismatch. The limiting critical thickness, coherent SK islands
h„of is
shown to be higher than that for 2D growth. We demonstrate growth of dislocation-free Ge islands on
=
Si to a thickness of 500 A, 50 X higher than h„for 2D Ge/Si epitaxy.
PACS numbers: 68.55.Ln
There are three known modes of heteroepitaxial layer strain. For a system with small interface energy
growth:' Frank-van der Merwe (FvdM) (Ref.
您可能关注的文档
- Adaptive force control of position-velocity controlled robots -- theory and experiment英文教材.pdf
- Advanced Position Control Design Based on Linear Theory for英文教材.pdf
- An Economic Theory of the Growth of the Western World D North 9英文教材.pdf
- An Embedded System for Position and Speed英文教材.pdf
- Arithmetic Elliptic Curves in General Position (comments)英文教材.pdf
- Arithmetic Elliptic Curves in General Position英文教材.pdf
- Beyond the Limits to Growth New Ideas for Sustainability fr英文教材.pdf
- Black hole growth in the early Universe is self-regulated and largely hidden from view英文教材.pdf
- Brand Leads Business Growth by Dr. Frank Chen英文教材.pdf
- Chapter 4_ Spatial Resolution and position accuracy 英文教材.pdf
文档评论(0)