课件讲义完整半导体微电子学tem.pdf

EE5514 IC Yield, Reliability & Failure Analysis Electron Beam Techniques - Transmission Electron Microscopy (TEM) Transmission Electron Microscopy (TEM) References • D. Chescoe and P.J. Goodhew, “The Operation of Transmission and Scanning Electron Microscopes”, Royal Microscopical Society Handbooks, Oxford University Press, 1990. • L. Reimer, “Transmission Electron Microscopy – Physics of Image Formation and Microanalysis”, Springer-Verlag, 4th Ed., 1997. • C.E. Lyman et al., “Scanning Electron Microscopy, X-Ray Microanalysis and Analytical Electron Microscopy: A Laboratory Workbook”, Plenum Press, 1990 [Laboratory 29 (Thin Samples for TEM and AEM) on TEM Sample Preparation]. • Z.L. Wang, “New Developments in Transmission Electron Microscopy for Nanotechnology”, Advanced Materials , vol. 15, no. 18, pp. 1497-1514, 2003. Transmission Electron Microscopy (TEM) Scope • Instrumentation • Types of Contrast • Operational/Imaging Modes • Resolution • Sample Preparation • lication Examples TEM - Introduction • The TEM operates at much higher acceleration voltages than a SEM. • Medium-voltage range TEMs operate at 200 to 500 kV to provide better transmission and resolution than low voltage (80 to 120 kV) TEMs. For very high-voltage TEMs, the acceleration voltage reaches 500 kV to 3 MV. • Just like in a SEM, electrons are emitted in the TEM electron gun by thermionic, Schottky or field emission (used when high gun brightness and coherence are required). • A two- to three-stage condenser lens system allows variation of the illumination area on the specimen. • The electron intensity distribution the thin (5 – 100 nm) specimen is imaged with a three- or four-stage lens system onto a fluorescent screen. TEM - Instrumentation Major components of a TEM.